Ultraviolet light source, laser treatment apparatus comprising ultraviolet light source, and exposure apparatus comprising ultraviolet light source

Ultraviolet light source, laser treatment apparatus comprising ultraviolet light source, and exposure apparatus comprising ultraviolet light source
United States Patent Application 20050259314
Kind Code A1
Tokuhisa, Akira ; et al. November 24, 2005
Abstract
An ultraviolet light source (1) comprises a laser light source (10) for generating a signal light in the infrared region, a optical amplifier (20) which comprises fiber optical amplifiers (21, 22) and amplifies the signal light generated by the laser light source (10), and a wavelength converting optical system (30) which coverts the signal light amplified by the light amplifier (20) into an ultraviolet light and outputs the converted light. The ultraviolet light source (1) uses a single-mode fiber laser (26) as an excitation light source for at least the fiber optical amplifier (22) at one stage of the optical amplifier (20).
Inventors: Tokuhisa, Akira; (Tokyo, JP) ; Kitano, Hiroshi; (Yokohama-shi, JP)
Correspondence Name and Address:
MORGAN LEWIS & BOCKIUS LLP
1111 PENNSYLVANIA AVENUE NW
WASHINGTON
DC
20004
US
Serial No.: 148428
Series Code: 11
Filed: June 9, 2005